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Electroless plating process applicable to UBM formation for aluminum electrodes on wafers

Power semiconductors are the core components of power electronics. They are transitioning from traditional silicon to materials like silicon carbide (SiC) and gallium nitride (GaN), which combine large bandgaps with high mobility.
These compound semiconductors are used in power devices that can operate at high temperatures due to their material properties. Therefore, packaging technology must be reliable in high-temperature environments.
OKUNO can improve the performance of such semiconductor devices with our long-cultivated electroless plating technology.

Electroless plating process applicable to UBM formation for aluminum electrodes on wafers

  • CleaningProduct name TORYZA ALC series

    Remove dirt from the surface of aluminum sputtering films.

    Cleaning

  • EtchingProduct name TORYZA ALC series

    Etch the surface of aluminum sputtering films to remove oxidized films.
    Cleaning and etching can be conducted at the same time by TORYZA ALC series.

    Etching

  • Surface conditioningProduct name TORYZA CD series

    Enhance the wettability of aluminum electrode surfaces to promote dense form formation in the subsequent zincate process.

    Surface conditioning

  • De-smuttingProduct name TORYZA DS series

    Remove smut and insoluble matters remaining on aluminum electrode surfaces.

    De-smutting

  • The first zincateProduct name TORYZA AZ series

    Form a dense zincate film on aluminum electrode surfaces.

    The first zincate

  • Zincate strippingProduct name TORYZA DS series

    Dissolve the first zincate film.
    Make a uniform oxide film that conforms to the surface shape, to promote dense film formation in the second zincate process.

    Zincate stripping

  • The second zincateProduct name TORYZA ZN series

    Form an even denser film on the aluminum electrode surface than the one produced in the first zincate step.

    The second zincate

  • Electroless nickel platingProduct name TORYZA NCR series

    Immerse into an electroless nickel plating solution containing nickel salts, reducing agents, and chelating agents. Nickel deposits by immersion reaction with zinc, and plating progresses through a self-catalytic reaction, forming a dense nickel film.

    Electroless nickel plating

  • Electroless palladium platingProduct name TORYZA PD series

    Obtain a palladium plating film with excellent heat resistance and barrier properties.

    Electroless palladium plating

  • Electroless gold platingProduct name TORYZA FG series

    Obtain a gold plating film with excellent solder wettability, solder joint performance, gold wire bonding performance.

    Electroless gold plating